Q2/2023 Investor Presentation

AIXTRON - FY/2023 Growth Guidance Upgraded EUR million FY/2023 Guidance ¹ Total Order Intake Revenues EUR 620m 700m (from EUR 600m - 680m) Revenue Guidance FY/2023 EUR million 0-30 EUR 600m - 660m (from EUR 580m - 640m) Gross Margin (%) Around 45% (unchanged) EBIT Margin (%) 25%-27% (unchanged) 1: At $1.15/€ Budget Rate for 2023; please refer to "Expected Results of Operations and Financial Position" in the AIXTRON 2022 Annual Report for further information 300-330 2 ~ 250 ~50 H1/23 Revenues Q3-Q4/23e Revenues from After Sales Q3-Q4/23e Revenues from Equipment Order Backlog Q3-Q4/23e Revenues from New Orders AIXTRON 6

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