Q2/2023 Investor Presentation

Four Year View on Consolidated Statement of Cash Flows¹ AIXTRON (EUR million) Net Result FY/22 100.5 FY/21 FY/20 FY/19 94.8 34.5 32.5 Adjust for: Non-Cash Items 5.7 5.7 8.0 13.1 Changes in Working Capital (69.1) (34.2) (19.2) (2.8) Cash Flow from Operating Activities² 37.1 66.4 23.3 42.8 Capital Expenditures/Disposals (29.5) (17.4) (9.3) (7.7) Free Cash Flow 7.7 48.7 14.0 35.1 FX Effects/Other (0.4) 3.2 (2.0) (0.1) Cash & cash deposits & investments 325.2 352.5 309.7 298.3 1 Rounded figures; may not add up 2 Excludes changes in financial assets 18

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