#1AIXTRON Q2/2023 Investor Presentation Dr. Felix Grawert, CEO Dr. Christian Danninger, CFO July 27th, 2023#2Forward-Looking Statements AIXTRON This document may contain forward-looking statements regarding the business, results of operations, financial condition and earnings outlook of AIXTRON. These statements may be identified by words such as "may", "will", "expect", "anticipate", "contemplate", "intend", "plan", "believe", "continue" and "estimate" and variations of such words or similar expressions. These forward-looking statements are based on the current assessments, expectations and assumptions of the executive board of AIXTRON, of which many are beyond control of AIXTRON, based on information available at the date hereof and subject to risks and uncertainties. You should not. place undue reliance on these forward-looking statements. Should these risks or uncertainties materialize or should underlying expectations not occur or assumptions prove incorrect, actual results, performance or achievements of AIXTRON may materially vary from those described explicitly or implicitly in the relevant forward-looking statement. This could result from a variety of factors, such as those discussed by AIXTRON in public reports and statements, including but not limited those reported in the chapter "Risk Report”. AIXTRON undertakes no obligation to revise or update any forward-looking statements as a result of new information, future events or otherwise, unless expressly required to do so by law. Due to rounding, numbers presented throughout this report may not add up precisely to the totals indicated and percentages may not precisely reflect the absolute figures for the same reason. Our registered trademarks: AIXACT®, AIXTRON®, Close Coupled Showerhead®, EXP®, EPISON®, Gas Foil Rotation®, Optacap™, OVPD®, Planetary Reactor®, PVPD®, STEXS®, TriJet® 1#3AIXTRON - Q2/2023 Highlights Q2/2023: Strong Order Momentum Continuing " ☐ Strong order intake in Q2/2023 - up by 17% yoy to EUR 178m Equipment order backlog up by 31% yoy to EUR 412m SiC & GaN Power Electronics biggest demand drivers - Q2/2023: Strong Quarterly Performance – Revenues and Profits increased significantly " " Revenues up 69% yoy to 174m Gross Profit up 94% yoy EBIT and Net Profit more than doubled yoy FY/2023 Growth Guidance Raised¹ " Order Intake: EUR 620m - 700m (from EUR 600m - 680m) Revenues: EUR 600m - 660m (from EUR 580m - 640m) Gross Margin: ~45% (unchanged) EBIT Margin: 25% - 27% (unchanged) 1 Based on $1.15/€ Budget Rate AIXTRON 2#4Consolidated Income Statement¹ AIXTRON (EUR million) H1/2023 H1/2022 +/- (%) Q2/2023 Q2/2022 +/- (%) Revenues 250.7 191.1 31% 173.5 102.5 69% Cost of sales 146.1 117.3 25% 100.0 64.7 55% Gross profit 104.6 73.7 42% 73.5 37.8 94% Gross margin 42% 39% 3pp 42% 37% 5pp Selling expenses 6.7 5.1 31% 3.6 2.5 44% General & admin expenses 16.5 13.8 20% 8.5 7.0 21% R&D 39.0 27.3 43% 19.8 13.2 50% Net other operating income (5.6) (3.9) 44% (3.0) (2.1) 43% EBIT 48.1 31.4 53% 44.6 17.2 159% EBIT margin 19% 16% 3pp 26% 17% 9pp Net profit 43.9 31.1 41% 40.4 17.3 134% 1 Rounded figures; may not add up 3#5Consolidated Balance Sheet¹ AIXTRON (EUR million) 30.06.23 31.03.23 31.12.22 Property, plant & equipment and leased assets 102.3 99.1 99.0 Goodwill 72.5 72.4 72.5 Other intangible assets 3.1 3.3 3.3 Others 36.2 34.9 35.0 Non-current assets 214.2 209.7 209.7 Inventories 332.8 295.0 223.6 Trade receivables 115.2 62.5 119.7 Others 29.3 31.7 24.5 Cash & cash deposits & investments 210.4 327.5 325.2 Current assets 687.7 716.8 692.9 Equity 674.7 667.7 663.3 Non-current liabilities 7.8 8.5 10.0 Trade payables 45.8 50.8 46.1 Contract liabilities for advance payment 139.3 162.3 141.2 Others 34.3 37.2 41.9 Current liabilities 219.4 250.3 229.3 Balance sheet total 901.9 926.4 902.6 1 Rounded figures; may not add up 4#6Consolidated Statement of Cash Flows (EUR million) Net result Adjust for: Non-cash items H1/2023 H1/2022 Q2/2023 43.9 31.1 40.4 AIXTRON Q2/2022 17.4 5.3 4.3 2.1 1.6 Changes in Working Capital (119.7) 1.0 (118.8) (9.8) Cash flow from operating activities (70.5) 36.4 (76.3) 9.2 Capital expenditures/disposals (9.6) (8.9) (5.7) (4.1) Free cash flow (80.1) 27.5 (82.0) 5.1 FX effects/other (1.3) 1.1 (0.7) 0.6 Cash & cash deposits & investments 210.4 346.2 210.4 346.2 1 Rounded figures; may not add up 2 Presentation of 2022 cash flow changed to include effects from valuation of investment funds in cash flow from operating activities 5#7AIXTRON - FY/2023 Growth Guidance Upgraded EUR million FY/2023 Guidance ¹ Total Order Intake Revenues EUR 620m 700m (from EUR 600m - 680m) Revenue Guidance FY/2023 EUR million 0-30 EUR 600m - 660m (from EUR 580m - 640m) Gross Margin (%) Around 45% (unchanged) EBIT Margin (%) 25%-27% (unchanged) 1: At $1.15/€ Budget Rate for 2023; please refer to "Expected Results of Operations and Financial Position" in the AIXTRON 2022 Annual Report for further information 300-330 2 ~ 250 ~50 H1/23 Revenues Q3-Q4/23e Revenues from After Sales Q3-Q4/23e Revenues from Equipment Order Backlog Q3-Q4/23e Revenues from New Orders AIXTRON 6#824 Months Business Development EUR million Order Intake (incl. equipment & after sales) 1 Revenues (incl. equipment & after sales)² Order Backlog (equipment only) 1 AIXTRON @ $1.25 @ $1.20 @ $1.15 @ $1.19 @ $1.06 @ $1.08 @ $1.25 @ $1.20 @ $1.15 418 412 369 352 314 268 260 183 174 215 114 120 130 160 153 143 140 178 181 131 102 89 89 77 mill. Q3 2021 Q4 Q1 Q2 Q3 Q4 2022 Q1 Q2 2023 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 2021 2022 2023 1 USD order intake and backlog were recorded at the prevailing budget rate (2021: $1.25/€; 2022: $1.20/€; 2023: $1.15/€) 2 USD revenues were converted at the actual period average FX rate (2021: $1.19/€; Q3/2022: $1.02/€; Q4/2022: $1,00/€; Q1/2022: $1.07/€; Q2/2023: $1.09/€) Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 2021 2022 2023 7#9H1/2023 Revenue Analysis¹ Equipment & After Sales End Application (equipment only) Regional Split Equipment After Sales 18% 82% 1 Rounded figures; may not add up 2 includes applications in Consumer Optoelectronics, Solar and Telecom/Datacom 5% 12% 21% 29% 83% LED inkl. Micro LED Power Electronics Optoelectronics & Communications² Other incl. R&D (<1%) Asia Europe Americas AIXTRON 50% 8#10Annual Total Revenues by Application (including After Sales) EUR million 269 260 269 230 183 194 198 196 2013 2014 LED incl. Micro LED After Sales 2015 2016 2017 2018 Power Electronics Silicon² 1 Includes applications in Consumer Optoelectronics, Solar and Telecom/Datacom 2) Silicon: ALD/CVD product line sold in 2017 AIXTRON 600-660e 463 429 H2/ 23e 2019 2020 2021 2022 2023 Optoelectronics and Communication FY23 Guidance low end Other incl. R&D FY23 Guidance high end H1/23 9#11Demand Drivers on Order Intake per Quarter (Equipment Only) EUR million 170 Equipment Demand 160 150 140 130 120 110 100 90 80 70 60 50 40 30 20 10 ا..لريلا 3D Sensing Lasers (VCSELS) SiC Power Electronics GaN Power Electronics, Lasers, ROY & Micro LEDs WBG Power Electronics, Lasers, ROY LEDS AIXTRON Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023 10 10#12EU Taxonomy Alignment & ESG-Ratings FY/2022: Revenues EU Taxonomy Aligned Technologies ◉ Wide Band Gap (WBG) Power Semiconductors based on: Gallium Nitride (GaN) and 42% Taxonomy Aligned 58% Taxonomy Non-Aligned ☐ Silicon Carbide (SiC) 38% 62% 27% 73% FY/2022: CapEx¹ Taxonomy Aligned Taxonomy Non-Aligned FY/2022: OpEx¹ Taxonomy Aligned Taxonomy Non-Aligned Key technologies for energy-efficient Power Electronics Micro LEDs: For the next generation of displays Laser Diodes for Data Communication: Key technology for the digitalization of our world Photovoltaics based on Compound Semiconductors: For high-tech applications (e.g.,space applications) Quantum Technologies: For neuromorphic computing and quantum sensing ESG-Ratings CDP: 2022: B " 2021: B ☐ 2020: D MSCI: 2023: AA " 2022: AA 2021: A 2020: BBB Sustainalytics: 2023: 19.6 - Low risk " 2022: 19.2 ISS Oekom: 2023: C- ▪ 2022: C- Low risk 1 In line with EU Taxonomy Regulation AIXTRON 11#13What We Do AIXTRON AIXTRON - a leading global supplier of Deposition Equipment for the Compound Semiconductor Industry AIXTRON D12 A 702233 RETROM AIXTRON RINTRON RIXTRON AIXTRON SICK 12 12#14Our Technology Portfolio for the Deposition of Complex Materials AIXTRON Power Management GaN Power & RF (e.g., Fast Charging, IT Power Supply, 5G, Wireless Communication) SiC Power (e.g., Electric Vehicles, Charging Stations, Infrastructure, Renewable Energies) MOCVD Core Technology Lasers (VCSEL/EEL) (e.g., Optical Datacom, Machine Vision, 3D Sensing, LiDAR) Micro LEDs and Specialty LEDs (e.g., Micro LEDs, Mini- and Fine Pitch-LEDs for Displays, Horticulture, Purification) Optoelectronics / LEDs AIXTRON 13#15AIXTRON - Market Position in MOCVD Deposition Equipment 2020 16% 2021 14% 11% USD 438m USD 561m 26% 58% Source: Gartner 2020-2022 75% AIXTRON Veeco AMEC 18% 2022 12% USD 566m AIXTRON 70% 14#16AIXTRON Competitive Landscape USA Europe China/Taiwan Korea GaAs/InP Lasers Opto Veeco Hermes Epitek ROY (Micro) LED GaN (Micro) LED Veeco AMEC CYTOPEC Hermes Epitek Power GaN Power Veeco AMEC Source: AIXTRON market research SiC Power CAJSG ПAURA 北方华创 LPE CNASO TECH 纳说解 能 EiCentury AIXTRON Japan TAIYO NIPPON SANSO The Gas Professionals TAIYO NIPPON SANSO The Gas Professionals TAIYO NIPPON SANSO The Gas Professionals NUFLARE TEL TOKYO ELECTRON NUFLARE 15#17Four Year View on Consolidated Income Statement¹ AIXTRON (EUR million) FY/22 FY/21 FY/20 FY/19 Revenues 463.2 429.0 269.2 259.6 Cost of sales 267.9 247.5 161.0 150.9 Gross profit 195.3 181.5 108.3 108.7 Gross margin 42% 42% 40% 42% Selling expenses 11.2 10.0 9.7 9.9 General & admin expenses 29.2 25.4 18.0 16.5 R&D 57.7 56.8 58.4 55.0 Net other operating income (7.6) (9.7) (12.6) (11.6) EBIT 104.7 99.0 34.8 39.0 EBIT margin 23% 23% 13% 15% Net result 100.5 94.8 34.5 32.5 1 Rounded figures; may not add up 16#18Four Year View on Consolidated Balance Sheet¹ AIXTRON 31.12.2019 (EUR million) Property, plant & equipment 31.12.2022 31.12.2021 31.12.2020 99.0 74.0 63.5 64.5 Goodwill Other intangible assets Others² 72.5 72.3 71 72.4 3.3 2.2 2.9 2.4 34.9 25.4 74.9 11.7 Non-current assets 209.7 174.0 212.2 151.0 Inventories 223.6 120.6 79.1 79.0 Trade receivables 119.7 81.0 41.3 29.2 Others 24.5 12.6 8.1 5.4 Cash & Cash Deposits & Investments 325.2 352.5 249.7 298.3 Current Assets 692.9 566.7 378.2 412.0 Equity 663.3 592.2 496.4 464.1 Non-current liabilities 10.0 8.5 6.6 4.5 Trade payables 46.1 19.6 10.8 19.4 Contract liabilities for advance payment 141.2 77.0 50.8 51.1 Others 41.9 43.4 25.8 23.9 Current liabilities 229.3 140.1 87.5 94.3 Balance Sheet total 902.6 740.7 590.4 563.0 1 Rounded figures; may not add up; 2 Includes cash deposits of €60m as per Dec. 31, 2020 17#19Four Year View on Consolidated Statement of Cash Flows¹ AIXTRON (EUR million) Net Result FY/22 100.5 FY/21 FY/20 FY/19 94.8 34.5 32.5 Adjust for: Non-Cash Items 5.7 5.7 8.0 13.1 Changes in Working Capital (69.1) (34.2) (19.2) (2.8) Cash Flow from Operating Activities² 37.1 66.4 23.3 42.8 Capital Expenditures/Disposals (29.5) (17.4) (9.3) (7.7) Free Cash Flow 7.7 48.7 14.0 35.1 FX Effects/Other (0.4) 3.2 (2.0) (0.1) Cash & cash deposits & investments 325.2 352.5 309.7 298.3 1 Rounded figures; may not add up 2 Excludes changes in financial assets 18#20AIXTRON - In a Nutshell AIXTRON Tools of record ahead of competition #1 #1 #2 Market leading position in almost every market AIXTRON Ga As Arsenic 74,92 31 Ga 7 31 33 N Gallium 69,72 Nitrogen 14,01 Gallium 69,72 14 49 15 "Si In P Silicon 28,09 Carbon 12,01 Indium 114,82 Phosphorus 30,97 Power - Speed - Light *Enabled by AIXTRON SE 證 柒 Diversified industry portfolio addressing multiple megatrends Sales CapEx OpEx 58% 38% 73% Asset light with strong balance sheet Taxonomy aligned business model 19#21Financial Calendar & Contact Data AIXTRON Our Financial Reporting Dates: 26 Oct Q3/23 Results, Conference Call For further information please contact: Guido Pickert Head of IR +49 (2407) 9030-444 [email protected] Christian Rottler Senior IR +49(2407) 9030-6153 [email protected] Conferences & Roadshows: 24 Aug 29-30 Aug 31 Aug 05 Sep 06 Sep 15 Sep 18-19 Sep 20 Sep HIT by Montega, Hamburg Jefferies Semi IT Summit, Chicago db Tech Conference, Dana Point ODDO TMT Conference, Frankfurt dbAccess TMT Conference, London Citi Growth Conference, London Berenberg & GS Conference, Munich. Baader Investment Conference, Munich AIXTRON SE Investor Relations & Corporate Communications Dornkaulstr. 2 52134 Herzogenrath Germany E-Mail: [email protected] 16 For Dial-in Data, please refer to our website: www.aixtron.com/en/investors/events/conference-calls 20#22H AIXTRON Our technology. Your future. AIXTRON SE Dornkaulstr. 2 52134 Herzogenrath, Germany Phone +49 (2407) 9030-0 Fax +49 (2407) 9030-40 E-Mail [email protected]